So far only Intel has had the $350 million machines and has two of them – both being set up in Oregon at its process technology development centre – but TSMC says that all its EUV customers have committed to take the new machines at some point.
TSMC says it is in no rush to bring the new machines into production and will pursue pathfinding and engineering work and trial runs with them.
It is said that TSMC will not use them in production until 2030 for its A10 process which comes two generations after its 2nm process.
Intel, which is in process technology catch-up mode, says it will use them for its 14A process scheduled for production in 2027.
